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Simulation of ion beam assisted deposition of layers on metals

✍ Scribed by F.F. Komarov; A.F. Komarov; A.M. Mironov


Book ID
113287565
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
356 KB
Volume
115
Category
Article
ISSN
0168-583X

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Applications of ion-beam-assisted deposi
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Irradiation of a substrate by an energetic ion beam during film deposition can drastically change the substrate surface, its structure, the surface chemistry, the nucleation processes and the type of coating which is produced. A wide range of novel coatings and improved adhesion to the substrate are