๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Silicon Nitride Layers on Tool Steel Produced by Ion Beam Mixing and Ion Beam Assisted Deposition

โœ Scribed by Hensel, E. ;Sommer, H. ;Knothe, P. ;Richter, E.

Publisher
John Wiley and Sons
Year
1989
Tongue
English
Weight
465 KB
Volume
112
Category
Article
ISSN
0031-8965

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Effect of beam voltage on the properties
Effect of beam voltage on the properties of aluminium nitride prepared by ion beam assisted deposition
โœ J. H. Edgar; C. A. Carosella; C. R. Eddy; D. T. Smith ๐Ÿ“‚ Article ๐Ÿ“… 1996 ๐Ÿ› Springer US ๐ŸŒ English โš– 709 KB

The effects of nitrogen-beam voltage on the structure, stress, energy band gap and hardness of AIN thin films deposited on Si (1 1 1), Si (1 00) and sapphire (0001) by ion beam assisted deposition (IBAD) are reported. As the nitrogen-beam voltage was increased from 50 to 200 V, the stress and disord