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Simulation based study of thermal effects on periodic nanostructures fabricated by laser interference

✍ Scribed by Velmurugan, V.; Raina, J.P.


Book ID
122584311
Publisher
Elsevier Science
Year
2014
Tongue
English
Weight
602 KB
Volume
17
Category
Article
ISSN
1369-8001

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## Abstract A simple and cost‐effective method to manufacture a phase mask with high diffraction efficiency for deep UV application is proposed. The deep rectangular grating fabricated by using laser interference is etched directly into a fused silica substrate, instead of the dielectric coating on