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Fabrication of magnetic nanostructures by direct laser interference lithography on supersaturated metal mixtures

✍ Scribed by A.E. Tselev; N.I. Polushkin; Y.K. Verevkin; A.A. Gorbunov; V.N. Petryakov; W. Pompe


Book ID
106023823
Publisher
Springer
Year
1999
Tongue
English
Weight
166 KB
Volume
69
Category
Article
ISSN
1432-0630

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## Abstract A simple and cost‐effective method to manufacture a phase mask with high diffraction efficiency for deep UV application is proposed. The deep rectangular grating fabricated by using laser interference is etched directly into a fused silica substrate, instead of the dielectric coating on