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Simulation analysis of the aluminum thin film thickness measurement by using low energy electron beam

✍ Scribed by Movla, Hossein; Babazadeh, Mohammad

Book ID: 123441457
Publisher: Elsevier Science
Year: 2014
Tongue: English
Weight: 471 KB
Volume: 125
Category: Article
ISSN: 0030-4026
DOI: 10.1016/j.ijleo.2013.06.033

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