Analysis of carbon film growth from low energy ion beams using dynamic trajectory simulations and Auger electron spectroscopy

✍ Scribed by Y. Lifshitz; C.D. Roux; K. Boyd; W. Eckstein; J.W. Rabalais

• Book ID: 113284438
• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 724 KB
• Volume: 83
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(93)95855-y