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Simulating the atomic layer deposition of alumina from first principles

✍ Scribed by Elliott, Simon D.; Greer, James C.

Book ID: 127341049
Publisher: Royal Society of Chemistry
Year: 2004
Tongue: English
Weight: 453 KB
Volume: 14
Category: Article
ISSN: 0959-9428
DOI: 10.1039/b405776g

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