A methodology for the kinetic Monte Carlo simulation of alumina atomic layer deposition onto silicon

✍ Scribed by G. Mazaleyrat; A. Estève; L. Jeloaica; M. Djafari-Rouhani

• Book ID: 116374421
• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 664 KB
• Volume: 33
• Category: Article
• ISSN: 0927-0256
• DOI: 10.1016/j.commatsci.2004.12.069