✦ LIBER ✦

SIMS, RBS, ion channelling, and TEM studies of the low energy SIMOX structures

✍ Scribed by Y. Li; J.A. Kilner; P.L.F. Hemment; A.K. Robinson; J.P. Zhang; K.J. Reeson; C.D. Marsh; G.R. Booker

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

A channeling/RBS study of SOI structures

✍ K. Touhouche; Y. Tao; A. Yelon; G. Kajrys; Y. Trudeau; K. Oxorn; S. Bultena; G. 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 400 KB

SIMS, RBS, and ion channelling studies o

✍ Yupu Li; J.A. Kilner; T.J. Tate; R.J. Chater; C. Jeynes; Z.H. Jafri 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 551 KB

RBS-channeling and TEM studies on the re

✍ Z. Zhang; I.A. Rusakova; W.K. Chu 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 479 KB

Investigation of ultra thin SiNxOy layer

✍ R.W. Michelmann; H. Baumann; A. Markwitz; J.D. Meyer; K. Bethge 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 209 KB

Quantitative analysis of the Ge concentr

✍ D. Krecar; M. Rosner; M. Draxler; P. Bauer; H. Hutter 📂 Article 📅 2005 🏛 Springer 🌐 English ⚖ 187 KB

3923. Effect of primary ion energy and s

📂 Article 📅 1979 🏛 Elsevier Science 🌐 English ⚖ 134 KB