Quantitative analysis of the Ge concentration in a SiGe quantum well: comparison of low-energy RBS and SIMS measurements

✍ Scribed by D. Krecar; M. Rosner; M. Draxler; P. Bauer; H. Hutter

• Publisher: Springer
• Year: 2005
• Tongue: English
• Weight: 187 KB
• Volume: 384
• Category: Article
• ISSN: 1618-2650
• DOI: 10.1007/s00216-005-0215-2