Simple Method for the Determination of the Doping Profile in MIS Structures with Implanted Shallow p-n Junction
โ Scribed by Lysenko, V. S. ;Nazarov, A. N. ;Rudenko, T. E.
- Publisher
- John Wiley and Sons
- Year
- 1985
- Tongue
- English
- Weight
- 263 KB
- Volume
- 91
- Category
- Article
- ISSN
- 0031-8965
No coin nor oath required. For personal study only.
๐ SIMILAR VOLUMES
## EBIC profiling of bevelled p-n structures is a powerful method to determine the actual positions of p-n junctions and steep doping gradients with a precision up to +lOOnm for slightly graded junctions (a = i019cm -4) and +20nm for one-sided abrupt junctions. Moreover, this method is capable ~o
## Abstract Soil cores from river marginal wetlands from the Torridge and Severn catchments in the UK were collected to study rates of soil denitrification at different sites and at two stations (levee and backplain depression) at the river margin. Half the cores were sterilized prior to flooding t