✦ LIBER ✦

Simple method for the defect control in X-ray mask fabrication

✍ Scribed by A. Kluwe; K.-H. Müller

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Improvements in graphite-based X-ray mas

✍ R. Divan; D.C. Mancini; S.M. Gallagher; J. Booske; D. Van der Weide 📂 Article 📅 2004 🏛 Springer-Verlag 🌐 English ⚖ 441 KB

Modeling of electron beam scattering in

✍ Gentili, M. ;Lucchesini, A. ;Scopa, L. ;Lugli, P. ;Paoletti, A. ;Messina, G. ;Sa 📂 Article 📅 1990 🏛 John Wiley and Sons 🌐 English ⚖ 647 KB

Improving the x-ray control method in re

✍ V. S. Rybakov; F. F. Ocheretnyuk; N. K. Selivanova; V. A. Esipova; A. A. Masents 📂 Article 📅 1991 🏛 Springer US 🌐 English ⚖ 108 KB

X-ray diffraction gratings for synchrotr

✍ Matsui, Shinji ;Moriwaki, Kazuyuki ;Aritome, Hiroaki ;Namba, Susumu ;Shin, Shik 📂 Article 📅 1982 🏛 The Optical Society 🌐 English ⚖ 862 KB

Gap control in the fabrication of quantu

✍ M. Burkhardt; S. Silverman; Henry I. Smith; D.A. Antoniadis; K.W. Rhee; M.C. Pec 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 601 KB

A simple method for the x-ray localizati

✍ Hermine Nitsche; Edith Va´lyi 📂 Article 📅 1958 🏛 Elsevier Science 🌐 English ⚖ 129 KB