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Simple and rapid determination of carrier concentration and mobility profiles in GaAs

โœ Scribed by J. Esteve; F. Ponse; K.-H. Bachem


Publisher
Elsevier Science
Year
1981
Tongue
English
Weight
311 KB
Volume
82
Category
Article
ISSN
0040-6090

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In-situ Determination of the Carrier Con
โœ Pristovsek, M. ;Tsukamoto, S. ;Koguchi, N. ;Han, B. ;Haberland, K. ;Zettler, J.- ๐Ÿ“‚ Article ๐Ÿ“… 2001 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 139 KB ๐Ÿ‘ 1 views

We demonstrate the use of Reflectance Anisotropy Spectroscopy (RAS) to determine the carrier concentration in GaAs of the topmost layers (%20 nm) in-situ during layer growth. The doping contributes to three features in the RAS spectra: an oscillation at 0 and an offset of the baseline of the whole