✦ LIBER ✦

SIMOX — a new challenge for ion implantation

✍ Scribed by A. Auberton-Herve; A. Wittkower; B. Aspar

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

SIMOX: Buried layer formation by ion imp

✍ Andrew B. Wittkower; Michael A. Guerra 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 594 KB

‘SIMOX’ (Separation by Ion Implantation

✍ B. Diem; R. Truche; S. Viollet-Bosson; G. Delapierre 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 444 KB

A new dose control technique for ion imp

✍ G. Ryding; M. Farley 📂 Article 📅 1981 🏛 Elsevier Science ⚖ 901 KB

A new 2 MV single-ended ion accelerator

✍ B. Cleff; W.-H. Schulte; H. Schulze; W. Terlau; R. Koudijs; P. Dubbelman; H.J. P 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 507 KB

Formation of unstrained Si1−xGex. layers

✍ B. Holländer; S. Mantl; W. Michelsen; S. Mesters; A. Hartmann; L. Vescan; D. Ger 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 517 KB

A new technique for characterizing low-d

✍ P.S. Fechner; G.R. Gardner; S.T. Liu 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 304 KB