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Silicon substrate temperature effects on surface roughness induced by ultrafast laser processing

✍ Scribed by J.S. Yahng; S.C. Jeoung

Book ID: 108233478
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 801 KB
Volume: 49
Category: Article
ISSN: 0143-8166
DOI: 10.1016/j.optlaseng.2011.04.008

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