Nanohole processing on silicon substrate by femtosecond laser pulse with localized surface plasmon polariton

✍ Scribed by Petar A. Atanasov; Hiroto Takada; Nikolay N. Nedyalkov; Minoru Obara

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 536 KB
• Volume: 253
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2007.02.108