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Enhanced near field mediated nanohole fabrication on silicon substrate by femtosecond laser pulse

✍ Scribed by Nikolay N. Nedyalkov; Tomoya Miyanishi; Minoru Obara

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 453 KB
Volume: 253
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2007.01.025

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