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Silicon oxynitride thin films synthesised by the reactive gas pulsing process using rectangular pulses

✍ Scribed by E. Aubry; S. Weber; A. Billard; N. Martin

Book ID: 116244517
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 993 KB
Volume: 257
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2011.06.141

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