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Silicon oxide films deposited by excimer laser chemical vapour deposition

✍ Scribed by T Szorényi; P González; M.D Fernández; J Pou; B León; M Pérez-Amor

Book ID
113204948
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
332 KB
Volume
193-194
Category
Article
ISSN
0040-6090

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