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Silicon-on-lnsulator Devices for High Voltage and Power IC Applications

✍ Scribed by Arnold, Emil


Book ID
126957377
Publisher
The Electrochemical Society
Year
1994
Tongue
English
Weight
810 KB
Volume
141
Category
Article
ISSN
0013-4651

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πŸ“œ SIMILAR VOLUMES


Low resistivity ohmic contacts on 4H-sil
✍ S.-K Lee; C.-M Zetterling; M Γ–stling; J.-P Palmquist; U Jansson πŸ“‚ Article πŸ“… 2002 πŸ› Elsevier Science 🌐 English βš– 233 KB

We investigated titanium based ohmic contacts using co-evaporated epitaxial titanium carbide (TiC) on highly 1 1 doped n -and p -type epilayers as well as Al ion implanted layers for high power and high temperature device application. Epitaxially grown TiC ohmic contacts on epilayers as well as Al i