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Silicon Nitride as an Antireflection Coating for Semiconductor Optics

โœ Scribed by Laff, R. A.


Book ID
115321124
Publisher
The Optical Society
Year
1971
Tongue
English
Weight
564 KB
Volume
10
Category
Article
ISSN
1559-128X

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Optimised antireflection coatings for pl
โœ Henning Nagel; Armin G. Aberle; Rudolf Hezel ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 210 KB ๐Ÿ‘ 2 views

Silicon nitride (SiN) ยฎlms fabricated by remote plasma-enhanced chemical vapour deposition (RPECVD) have recently been shown to provide an excellent electronic passivation of silicon surfaces. This property, in combination with its large refractive index, makes RPECVD SiN an ideal candidate for a su