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Plasma-enhanced CVD silicon nitride antireflection coatings for solar cells

โœ Scribed by C.C. Johnson; T. Wydeven; K. Donohoe


Book ID
107852902
Publisher
Elsevier Science
Year
1983
Tongue
English
Weight
299 KB
Volume
31
Category
Article
ISSN
0038-092X

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โœ Henning Nagel; Armin G. Aberle; Rudolf Hezel ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 210 KB ๐Ÿ‘ 2 views

Silicon nitride (SiN) ยฎlms fabricated by remote plasma-enhanced chemical vapour deposition (RPECVD) have recently been shown to provide an excellent electronic passivation of silicon surfaces. This property, in combination with its large refractive index, makes RPECVD SiN an ideal candidate for a su