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Silicon micromachining for millimeter-wave applications

✍ Scribed by Guillon, B.; Grenier, K.; Pons, P.; Cazaux, J. L.; Lalaurie, J. C.; Cros, D.; Plana, R.

Book ID: 126265108
Publisher: AVS (American Vacuum Society)
Year: 2000
Tongue: English
Weight: 573 KB
Volume: 18
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.582170

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