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New micromachined microstrip transmission lines for application in millimeter-wave circuits

✍ Scribed by Han-Shin Lee; Sung-Chan Kim; Byoung-Ok Lim; Kyoung-Man Kim; Won-Young Uhm; Young-Hoon Chun; Dong-Hoon Shin; Soon-Koo Kim; Hyun-Chang Park; Jin-Koo Rhee

Publisher
John Wiley and Sons
Year
2003
Tongue
English
Weight
199 KB
Volume
40
Category
Article
ISSN
0895-2477

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✦ Synopsis

Abstract

In this paper, we describe a new GaAs‐based micromachined microstrip line, supported by an electrically supported air‐gapped microstrip line (DAML) structure and developed using RF MEMS techniques to achieve low losses at millimeter‐wave frequency bands with wide impedance ranges. The measured DAML with a 10‐μm post height shows less than 1.5‐dB/cm attenuation at 50 GHz with 20–100Ω, which agrees well with the simulated results. © 2004 Wiley Periodicals, Inc. Microwave Opt Technol Lett 40: 6–9, 2004; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.11270

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