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Silicon luminescence induced by bombardment with fast hydrogen ions

✍ Scribed by O.V. Kalantaryan; V.T. Kolesnik; S.I. Kononenko; V.I. Muratov; V.E. Storizhko


Book ID
114169179
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
332 KB
Volume
129
Category
Article
ISSN
0168-583X

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We report on the observation of fast hydrogen atoms in a capacitively coupled RF reactor by optical emission spectroscopy. For the analysis we use the prominent H Ξ± emission line of atomic hydrogen in combination with other lines from molecular hydrogen and argon. Several characteristic emission str