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Observation of Fast Hydrogen Atoms Formed by Ion Bombarding of Surfaces

✍ Scribed by T. Gans; V. Schulz-von der Gathen; U. Czarnetzki; H.F. Döbele

Publisher
John Wiley and Sons
Year
2002
Tongue
English
Weight
141 KB
Volume
42
Category
Article
ISSN
0005-8025

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✦ Synopsis

We report on the observation of fast hydrogen atoms in a capacitively coupled RF reactor by optical emission spectroscopy. For the analysis we use the prominent H α emission line of atomic hydrogen in combination with other lines from molecular hydrogen and argon. Several characteristic emission structures can be identified. One of these structures is related to fast hydrogen atoms traveling from the surface of the powered electrode to the plasma bulk. From the appearance time within the RF period we conclude that this feature originates from ion bombardment of the electrode surface. Measured pressure dependencies and a simple model for the ion dynamics support this assumption.

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