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XPS observations of yttrium surface bombarded with energetic hydrogen-ions

✍ Scribed by Y. Baba; T.A. Sasaki


Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
274 KB
Volume
138
Category
Article
ISSN
0022-3115

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We report on the observation of fast hydrogen atoms in a capacitively coupled RF reactor by optical emission spectroscopy. For the analysis we use the prominent H Ξ± emission line of atomic hydrogen in combination with other lines from molecular hydrogen and argon. Several characteristic emission str