Observation of Fast Hydrogen Atoms Forme
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T. Gans; V. Schulz-von der Gathen; U. Czarnetzki; H.F. DΓΆbele
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Article
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2002
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John Wiley and Sons
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English
β 141 KB
We report on the observation of fast hydrogen atoms in a capacitively coupled RF reactor by optical emission spectroscopy. For the analysis we use the prominent H Ξ± emission line of atomic hydrogen in combination with other lines from molecular hydrogen and argon. Several characteristic emission str