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Silicon dioxide thin films prepared by photochemical vapor deposition from silicon tetraacetate

✍ Scribed by Toshiro Maruyama; Teruoki Tago

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 289 KB
Volume: 232
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(93)90009-e

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