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Silicon-carbon reaction provoked by the sputter cleaning of lightly contaminated crystalline silicon

โœ Scribed by B. Lamontagne; E. Sacher; M.R. Wertheimer


Book ID
103615691
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
306 KB
Volume
52
Category
Article
ISSN
0169-4332

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