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Silicon carbon nitride films as passivation and antireflective coatings for silicon solar cells

โœ Scribed by Silva, J.A.; Quoizola, S.; Hernandez, E.; Thomas, L.; Massines, F.


Book ID
122218796
Publisher
Elsevier Science
Year
2014
Tongue
English
Weight
785 KB
Volume
242
Category
Article
ISSN
0257-8972

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โœ Henning Nagel; Armin G. Aberle; Rudolf Hezel ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 210 KB ๐Ÿ‘ 2 views

Silicon nitride (SiN) ยฎlms fabricated by remote plasma-enhanced chemical vapour deposition (RPECVD) have recently been shown to provide an excellent electronic passivation of silicon surfaces. This property, in combination with its large refractive index, makes RPECVD SiN an ideal candidate for a su