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Silicon carbide formation with e-beam and laser pulses

✍ Scribed by E. D'Anna; G. Leggieri; A. Luches; V. Nassisi; A. Perrone; G. Majni; P. Mengucci

Book ID: 103615420
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 749 KB
Volume: 36
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(89)90944-6

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