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Silicon capacitive pressure transducer with increased modulation depth

✍ Scribed by V.M. Artyomov; E.A. Kudryashov; V.A. Shelenshkevich; A.I. Shulga

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 623 KB
Volume: 28
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(91)85011-c

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