A monolithic compensated silicon pressure transducer with temperature output for biomedical applications
✍ Scribed by D. Otter; S. Ansermet; C. Werner
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 419 KB
- Volume
- 4
- Category
- Article
- ISSN
- 0925-4005
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✦ Synopsis
A biomedical monolithic compensated pressure and temperature transducer for the ranges 660 to 1160 mmHg and 10 to 50 °C has been developed. It is realized by an application-specific design and a compatible IC/ sensor process. The shape and size constraints associated with mounting in a catheter lead to a very narrow device. Nevertheless, it shows high sensitivity and reproducible characteristics from chip to chip. Measurement results show the industrial feasibility of the co-integration of micromachined sensor and active electronics in biomedical and other applications. The industrial use of an electrochemical etch-stop on a monolithic compensated pressure transducer has also been proved.