Smart CMOS capacitive pressure transducer with on-chip calibration capability

✍ Scribed by F.V. Schnatz; U. Schöneberg; W. Brockherde; P. Kopystynski; T. Mehlhorn; E. Obermeier; H. Benzel

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 292 KB
• Volume: 34
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/0924-4247(92)80142-p