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Silicon amorphization by ion beam with radiation heating

✍ Scribed by Danilin, A. B. ;Dvurechenskii, A. V. ;Ryazantsev, I. A. ;Timofeev, P. A. ;Verner, V. D.

Publisher: John Wiley and Sons
Year: 1981
Tongue: English
Weight: 525 KB
Volume: 65
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2210650206

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