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Silicide layer formation in evaporated and sputtered Fe/Si multilayers: X-ray and neutron reflectivity study

✍ Scribed by Amir, S.M.; Gupta, M.; Gupta, A.; K., Ambika; Stahn, J.

Book ID: 122090181
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 726 KB
Volume: 277
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2013.04.021

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