Si/C phases from the IR laser-induced de
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Vladislav Dřínek; Zdeněk Bastl; Jan Šubrt; Josef Pola
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Article
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1998
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John Wiley and Sons
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English
⚖ 642 KB
Transversely excited atmospheric (TEA) CO 2 laser-induced decomposition of divinylsilane in the gas phase yields unsaturated C 2 -C 4 hydrocarbons, benzene and vinylsilane, and it represents a convenient process for chemical vapour deposition of thin solid films composed of silicon carbide and polyc