✦ LIBER ✦
UV laser deposition of nanostructured Si/C/O/N/H from disilazane precursors and evolution to silicon oxycarbonitride
✍ Scribed by Josef Pola; Anna Galíková; Zdeněk Bastl; Jan Šubrt; Karel Vacek; Jiří Brus; Akihiko Ouchi
- Publisher
- John Wiley and Sons
- Year
- 2006
- Tongue
- English
- Weight
- 475 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0268-2605
- DOI
- 10.1002/aoc.1135
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