Si/C phases from the IR laser-induced decomposition of divinylsilane

✍ Scribed by Vladislav Dřínek; Zdeněk Bastl; Jan Šubrt; Josef Pola

• Publisher: John Wiley and Sons
• Year: 1998
• Tongue: English
• Weight: 642 KB
• Volume: 12
• Category: Article
• ISSN: 0268-2605
• DOI: 10.1002/(sici)1099-0739(199806)12:6<427::aid-aoc715>3.0.co;2-o

✦ Synopsis

Transversely excited atmospheric (TEA) CO 2 laser-induced decomposition of divinylsilane in the gas phase yields unsaturated C 2 -C 4 hydrocarbons, benzene and vinylsilane, and it represents a convenient process for chemical vapour deposition of thin solid films composed of silicon carbide and polycarbosilane.