✦ LIBER ✦

Si3N4 crystallization during high temperature nitrogen implantation into silicon

✍ Scribed by U. Bussmann; F.H.J. Meerbach; E.H. Te Kaat

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Formation of thin Si3N4 films by nitroge

✍ A.D. Yadav; M.C. Joshi 📂 Article 📅 1979 🏛 Elsevier Science 🌐 English ⚖ 228 KB

Formation of thin Si3N4 films by nitroge

✍ A.D. Yadav; M.C. Joshi 📂 Article 📅 1979 🏛 Elsevier Science 🌐 English ⚖ 30 KB

Formation of Si3N4 by nitrogen implantat

✍ S. Miyagawa; K. Baba; M. Ikeyama; K. Saitoh; S. Nakao; Y. Miyagawa 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 572 KB

Formation of crystalline α-Si3N4 layers

✍ Xianghuai Liu; G. Derst; W. Krätschmer; S. Kalbitzer 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 222 KB

The formation of buried Si3N4 layers in

✍ U. Kreissig; W. Skorupa; E. Hensel 📂 Article 📅 1983 🏛 Elsevier Science 🌐 English ⚖ 177 KB

Temperature influence during high-fluenc

✍ B. Rauschenbach 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 839 KB