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Si-rich Al2O3films grown by RF magnetron sputtering: structural and photoluminescence properties versus annealing treatment

✍ Scribed by Nadiia Korsunska, Larysa Khomenkova, Oleksandr Kolomys…

Book ID
120946859
Publisher
Springer-Verlag
Year
2013
Tongue
English
Weight
682 KB
Volume
8
Category
Article
ISSN
1931-7573

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The N-doped b-Ga 2 O 3 films were grown on Si and quartz substrates by RF magnetron sputtering in different ammonia partial pressure ratios (from 0% to 30%). The influence of ammonia partial pressure ratios and annealing treatment on the optical and structural properties were studied. The microstruc