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Effects of low-temperature-buffer, rf-power, and annealing on structural and optical properties of ZnO/Al[sub 2]O[sub 3](0001) thin films grown by rf-magnetron sputtering

โœ Scribed by Liu, H. F.; Chua, S. J.


Book ID
121707994
Publisher
American Institute of Physics
Year
2009
Tongue
English
Weight
905 KB
Volume
106
Category
Article
ISSN
0021-8979

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ZnO thin films were deposited on corning glass substrates by RF magnetron sputtering at room temperature. The dependence of crystal structure, morphology and optical properties on postdeposition annealing was investigated using XRD, AFM and UV-vis Spectrophotometer. The asdeposited films were amorph