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Shape-controlled microlens arrays fabricated by diffuser lithography

โœ Scribed by Jie-Ming Kang; Mau-Kuo Wei; Hung-Yi Lin; Juin-Haw Lee; Hoang-Yan Lin; Jen-Hui Tsai; Tung-Chuan Wu

Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
339 KB
Volume
87
Category
Article
ISSN
0167-9317

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of Zygo Corporation for assistance and use of their optical profiler in the characterization of the compound lens structures. We thank Andrew Smith for assisting in optical characterization of the microlens arrays and Jong-Young Lee for help with atomic force microscopy measurements. We also acknowl