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Shape and correlation of oxygen precipitates in silicon

✍ Scribed by D. Sieger; H. Tietze-Jaensch; R. Geick; W. Zulehner; A. de Geyer


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
263 KB
Volume
180-181
Category
Article
ISSN
0921-4526

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