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Separation of replicas from the polymer surface etched in oxygen plasma

✍ Scribed by Ye.V. Lebedev; I. Gede; L.I. Bezruk; Yu.S. Lipatov

Book ID: 118965422
Publisher: Elsevier Science
Year: 1977
Weight: 127 KB
Volume: 19
Category: Article
ISSN: 0032-3950
DOI: 10.1016/0032-3950(77)90065-x

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