Sensors by micromachining
โ Scribed by Masayoshi Esashi
- Book ID
- 112078608
- Publisher
- John Wiley and Sons
- Year
- 1991
- Tongue
- English
- Weight
- 515 KB
- Volume
- 74
- Category
- Article
- ISSN
- 8756-663X
No coin nor oath required. For personal study only.
๐ SIMILAR VOLUMES
Sensing system requirements vary considerably from system to system and depend heavily upon the market segment and application : automotive versus industrial, manifold absolute pressure versus blood pressure. Both of these particular examples utilize micromachined silicon and have been the focus of
Advances m sdlcon nucromachmmg technology have greatly contributed towards the evolution of slhcon micromechamcal sensors and have added to the vlahhty of mlcroactuators fabrxated m slhcon Both bulk and surface nucromaclunmg have also be-en employed for the reahzatlon of various new types of radiant