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Sensor guided handling and assembly of active micro-systems

✍ Scribed by S. Büttgenbach; J. Hesselbach; R. Tutsch; M. Berndt; B. Hoxhold; K. Schöttler

Publisher
Springer-Verlag
Year
2006
Tongue
English
Weight
344 KB
Volume
12
Category
Article
ISSN
0946-7076

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✍ Xue, Chenyang ;Hu, Jie ;Zhang, Wendong ;Zhang, Binzhen ;Xiong, Jijun ;Chen, Yong 📂 Article 📅 2010 🏛 John Wiley and Sons 🌐 English ⚖ 646 KB

## Abstract Double‐barrier quantum‐well resonant tunneling heterostructures of GaAs/In~0.1~Ga~0.9~As/AlAs have been used as pressure‐sensing elements of designed micro‐electro‐mechanical systems. The static experiments have been conducted on the heterostructure, in both positive and negative differ