✦ LIBER ✦
Thin-film nano- and micro-electromechanical systems – the basis of contemporary and future pressure sensors for rocket and aviation engineering
✍ Scribed by E. M. Belozubov; V. A. Vasil’ev; N. V. Gromkov
- Publisher
- Springer US
- Year
- 2009
- Tongue
- English
- Weight
- 224 KB
- Volume
- 52
- Category
- Article
- ISSN
- 0543-1972
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