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Assembly and measuring technique for the manufacturing of active micro systems

✍ Scribed by J. Hesselbach; R. Tutsch; S. Büttgenbach; G. Pokar; S. Bütefisch; M. Berndt

Publisher
Springer-Verlag
Year
2004
Tongue
English
Weight
320 KB
Volume
10
Category
Article
ISSN
0946-7076

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