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Sensitivity of the dielectric strength of a thin-film capacitor to the substrate temperature and deposition rate during the deposition ofthe silicon monoxide dielectric film

✍ Scribed by N. P. Pervukhin; M. S. Metsik


Book ID
112418836
Publisher
Springer
Year
1969
Tongue
English
Weight
301 KB
Volume
12
Category
Article
ISSN
1573-9228

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